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Massachusetts Institute of Technology Nano Fab Tool Installation Cambridge, MA

Description

MIT contracted Hodess for the tool installation in their NANO fab in Cambridge, MA, completed in multiple phases. The Nano cleanroom is located in a newly constructed building with the fab spread across five levels. The main nano cleanrooms on Levels 1 and 3 are ISO Class 5 bay chase cleanrooms. Additional clean imaging suites, smaller clean areas, and semi-clean fan deck interstitial spaces are on Levels 2 and 4. The sub-fab below Level 1 houses vibration-monitored microscope lab spaces, and additional semi-clean lab space is on Level 5. These cleanrooms serve as R&D spaces for the university’s nanotechnology science sector.

Industry

Microelectronics / University

Project Delivery

Construction Management

ISO Class

ISO 5

Image showing cleanroom with particle sensors done by Hodess for Vanderbilt University
Image showing cleanroom with machinery done by Hodess for Vanderbilt University
Image showing cleanroom with machinery done by Hodess for Vanderbilt University
Image showing tool installation done by Hodess at Massachusetts institute of Technology cleanroom
Image showing tool installation done by Hodess at Massachusetts institute of Technology cleanroom

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